Polycrystalline silicon nanowires synthesis compatible with CMOS technology for integrated gas sensing applications
type: Dataset
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticsarticle
keyword: polysilicon
keyword: lpcvd
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: nanowires
keyword: in-situ-doping
keyword: journal-articles
keyword: tft
landing page: 0018-9383
description: International audience
issued: 2026-05-06T03:12:26.393538
language: en
modified: 2026-05-06T03:12:26.393542

test_moissonnage_selune
type: Agent

Polycrystalline silicon nanowires synthesis compatible with CMOS technology for integrated gas sensing applications
type: Distribution
access URL: https://hal.science/hal-00956209
format: HTML
issued: 2026-05-06T03:12:26.410242
modified: 2026-05-06T03:12:26.381256