Thermal deposition of titanium nitride by MOCVD using Ti(Net2)4
type: Dataset
description: International audience
issued: 2026-05-06T07:21:20.538830
language: en
modified: 2026-05-06T07:21:20.538835
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
landing page: EuroCVD conference

Thermal deposition of titanium nitride by MOCVD using Ti(Net2)4
type: Distribution
format: HTML
issued: 2026-05-06T07:21:20.542807
modified: 2026-05-06T07:21:20.534336
access URL: https://hal.science/hal-00949996

test_moissonnage_selune
type: Agent