@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00944892v1> a dcat:Dataset ;
    dct:description "International audience" ;
    dct:identifier "hal-00944892" ;
    dct:issued "2026-05-06T20:46:50.638387"^^xsd:dateTime ;
    dct:language "en" ;
    dct:modified "2026-05-06T20:46:50.638391"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Chemical topography analysis of silicon gates etched in HBr/Cl2/O2 and HBr/Cl2/O2/CF4 high density plasmas" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00944892v1/resource/d65fb33f-ada8-4329-aeff-304a2f71d3f8> ;
    dcat:keyword "infoeu-reposemanticsarticle",
        "journal-articles",
        "physphysics-physics" ;
    dcat:landingPage <ISSN:%200022-5355> .

<ISSN:%200022-5355> a foaf:Document .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00944892v1/resource/d65fb33f-ada8-4329-aeff-304a2f71d3f8> a dcat:Distribution ;
    dct:format "HTML" ;
    dct:issued "2026-05-06T20:46:50.645818"^^xsd:dateTime ;
    dct:modified "2026-05-06T20:46:50.631034"^^xsd:dateTime ;
    dct:title "Chemical topography analysis of silicon gates etched in HBr/Cl2/O2 and HBr/Cl2/O2/CF4 high density plasmas" ;
    dcat:accessURL <https://hal.science/hal-00944892> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
    foaf:name "test_moissonnage_selune" .

