On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri-Isopropoxide Studied by FTIR Spectroscopy
type: Dataset
description: International audience
issued: 2026-05-07T02:47:05.478826
language: en
modified: 2026-05-07T02:47:05.478830
contact point: Organization
  fn: CCSD
keyword: alxoy-film-deposition
keyword: ati
keyword: ftir-spectroscopy
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: physphysphys-plasm-phphysics-physicsphysics-physicsplasma-physics-physicsplasm-ph
keyword: plasma-chemistry
keyword: spiplasmaengineering-sciences-physicsplasmas
landing page: 0863-1042

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri-Isopropoxide Studied by FTIR Spectroscopy
type: Distribution
format: HTML
issued: 2026-05-07T02:47:05.483357
modified: 2026-05-07T02:47:05.468818
access URL: https://hal.science/hal-00942271

test_moissonnage_selune
type: Agent