New characterization methods for monitoring small resonant frequency variation. Application: Uncoated Silicon Microcantilever-based Sensors
type: Dataset
issued: 2026-05-07T08:35:20.541026
language: en
modified: 2026-05-07T08:35:20.541031
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: Journées nationales du GDR Micro Nano-Systèmes

New characterization methods for monitoring small resonant frequency variation. Application: Uncoated Silicon Microcantilever-based Sensors
type: Distribution
format: HTML
issued: 2026-05-07T08:35:20.544336
modified: 2026-05-07T08:35:20.535336
access URL: https://hal.science/hal-00933254

test_moissonnage_selune
type: Agent