@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:language "en" ;
    dct:modified "2026-05-09T02:55:50.930233"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
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        "spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics" ;
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<8th%20International%20Conference%20on%20MicroManufacturing%20%28ICOMM%202013%29> a foaf:Document .

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    dct:title "Towards CNC Automation in AFM Probe-Based Nano Machining" ;
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