Closed-loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation.
type: Dataset
description: International audience
issued: 2026-05-09T11:43:36.994513
language: en
modified: 2026-05-09T11:43:36.994518
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: The 6th IFAC Symposium on Mechatronic Systems (Mechatronics'2013).

Closed-loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation.
type: Distribution
format: HTML
issued: 2026-05-09T11:43:36.996305
modified: 2026-05-09T11:43:36.989557
access URL: https://hal.science/hal-00869932

test_moissonnage_selune
type: Agent