Study of aluminium tri-isopropoxide (ATI) chemistry in an rf plasma by FTIR spectroscopy
type: Dataset
description: Poster
issued: 2026-05-10T19:27:43.527399
language: en
modified: 2026-05-10T19:27:43.527405
contact point: Organization
  fn: CCSD
keyword: 5227lw
keyword: aluminium-tri-isopropoxide
keyword: ati
keyword: conference-papers
keyword: fourier-transform-infrared
keyword: ftir
keyword: infoeu-reposemanticsconferenceobject
keyword: physphysphys-plasm-phphysics-physicsphysics-physicsplasma-physics-physicsplasm-ph
keyword: plasma
keyword: spiplasmaengineering-sciences-physicsplasmas
landing page: 10th Frontiers in Low Temperature Plasma Diagnostics

Study of aluminium tri-isopropoxide (ATI) chemistry in an rf plasma by FTIR spectroscopy
type: Distribution
format: HTML
issued: 2026-05-10T19:27:43.549617
modified: 2026-05-10T19:27:43.514377
access URL: https://hal.science/hal-00831959

test_moissonnage_selune
type: Agent