Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches
type: Dataset
description: International audience
issued: 2026-05-11T00:13:40.831063
language: en
modified: 2026-05-11T00:13:40.831068
contact point: Organization
  fn: CCSD
keyword: aluminum
keyword: ballistic-model
keyword: feature-scale-model
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: magnetron-sputtering-deposition
keyword: mocvd
keyword: molecular-dynamics-simulation
keyword: spiplasmaengineering-sciences-physicsplasmas
landing page: 0040-6090

Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches
type: Distribution
format: HTML
issued: 2026-05-11T00:13:40.836785
modified: 2026-05-11T00:13:40.819768
access URL: https://hal.science/hal-00826502

test_moissonnage_selune
type: Agent