Reversing tone of patterns on integrated circuit and nanoscale fabrication
type: Dataset
landing page: https://hal.science/hal-00808853
identifier: Patent N°: US 8,183,694
keyword: infoeu-reposemanticspatent
keyword: patents
issued: 2026-05-11T15:54:54.582067
modified: 2026-05-11T15:54:54.582072
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Reversing tone of patterns on integrated circuit and nanoscale fabrication
type: Distribution
format: HTML
access URL: https://hal.science/hal-00808853
issued: 2026-05-11T15:54:54.583808
modified: 2026-05-11T15:54:54.577979