TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition
type: Dataset
contact point: Organization
  fn: CCSD
keyword: chimmatechemical-sciencesmaterial-chemistry
keyword: hard-coatings
keyword: mocvd
keyword: journal-articles
keyword: infoeu-reposemanticsarticle
keyword: tioxny
keyword: atmospheric-pressure-cvd
keyword: spimatengineering-sciences-physicsmaterials
landing page: 0257-8972
description: International audience
issued: 2026-05-11T21:10:18.880186
language: en
modified: 2026-05-11T21:10:18.880193

test_moissonnage_selune
type: Agent

TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition
type: Distribution
access URL: https://hal.science/hal-00806194
format: HTML
issued: 2026-05-11T21:10:18.887382
modified: 2026-05-11T21:10:18.857389