@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:language "en" ;
    dct:modified "2026-05-12T15:59:42.990123"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Wafer-level BCB cap packaging of integrated MEMS switches with MMIC" ;
    dcat:contactPoint [ a vcard:Organization ;
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<Proceedings%20of%2060th%20IEEE%20MTT-S%20International%20Microwave%20Symposium%2C%20IMS%202012> a foaf:Document .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00801069v1/resource/ddf09ce1-2995-4fc4-9557-2b81d5809955> a dcat:Distribution ;
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    dct:modified "2026-05-12T15:59:42.983601"^^xsd:dateTime ;
    dct:title "Wafer-level BCB cap packaging of integrated MEMS switches with MMIC" ;
    dcat:accessURL <https://hal.science/hal-00801069> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
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