Fabrication and characterization of half-Kerfed LiNbO3-based high-frequency (>100MHz) ultrasonic array transducers
type: Dataset
description: The effect of kerf depth is investigated on the performances of array transducers. A finite element tool, COMSOL, is employed to simulate the properties of acoustic field and to calculate the electrical properties of the arrays, including crosstalk effect and electrical impedance. Furthermore, Inductively Coupled Plasma (ICP) deep etching process is used to etch 36°/Y-cut lithium niobate (LiNbO 3 ) crystals and the limitation of etching aspect ratio is studied. Several arrays with different profiles are realized under optimized processes. At last, arrays with different pitches are fabricated and characterized by a network analyzer.
issued: 2026-05-12T19:11:31.904885
language: en
modified: 2026-05-12T19:11:31.904891
contact point: Organization
  fn: CCSD
keyword: arrays-with-different-pitches-are-fabricated-and-characterized-by-a-network-analyzer
keyword: comsol
keyword: conference-papers
keyword: including-crosstalk-effect-and-electrical-impedance-furthermore
keyword: inductively-coupled-plasma-icp-deep-etching-process-is-used-to-etch-36y-cut-lithium-niobate-lin
keyword: infoeu-reposemanticsconferenceobject
keyword: is-employed-to-simulate-the-properties-of-acoustic-field-and-to-calculate-the-electrical-properties
keyword: spiengineering-sciences-physics
keyword: the-effect-of-kerf-depth-is-investigated-on-the-performances-of-array-transducers-a-finite-element
landing page: IEEE International Ultrasonics Symposium, IUS 2011

Fabrication and characterization of half-Kerfed LiNbO3-based high-frequency (>100MHz) ultrasonic array transducers
type: Distribution
format: HTML
issued: 2026-05-12T19:11:31.923686
modified: 2026-05-12T19:11:31.874397
access URL: https://hal.science/hal-00800467

test_moissonnage_selune
type: Agent