The metrology and applications of PSD (position sensitive detector) sensors for microrobotics.
type: Dataset
contact point: Organization
  fn: CCSD
keyword: psd-position-sensitive-detector
keyword: sensing
keyword: microrobotics
keyword: optics
keyword: infoeu-reposemanticsconferenceobject
keyword: moems
keyword: optomechatronics
keyword: conference-papers
keyword: smart-surface
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: Symposium on OptoMechatronic Technologies.
description: International audience
issued: 2026-05-13T09:12:31.128485
language: en
modified: 2026-05-13T09:12:31.128501

test_moissonnage_selune
type: Agent

The metrology and applications of PSD (position sensitive detector) sensors for microrobotics.
type: Distribution
access URL: https://hal.science/hal-00797889
format: HTML
issued: 2026-05-13T09:12:31.210144
modified: 2026-05-13T09:12:31.097921