Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films
type: Dataset
description: International audience
issued: 2026-05-13T11:11:47.441488
language: en
modified: 2026-05-13T11:11:47.441493
contact point: Organization
  fn: CCSD
keyword: amorphous
keyword: epitaxy
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: pecvd
keyword: physcondcm-msphysics-physicscondensed-matter-cond-matmaterials-science-cond-matmtrl-sci
keyword: plasma-enhanced-cvd-deposition
landing page: 1946-4274

Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films
type: Distribution
format: HTML
issued: 2026-05-13T11:11:47.475588
modified: 2026-05-13T11:11:47.426328
access URL: https://polytechnique.hal.science/hal-00797647

test_moissonnage_selune
type: Agent