CMOS Post-Processing of Ciliary Motion Actuators of UV-patterned Polyimides
type: Dataset
description: International audience
issued: 2026-05-15T04:44:44.174604
language: en
modified: 2026-05-15T04:44:44.174608
contact point: Organization
  fn: CCSD
keyword: actuator
keyword: bimorph
keyword: cmos
keyword: conference-papers
keyword: conveyor
keyword: infoeu-reposemanticsconferenceobject
keyword: polyimide
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: IEEJ Technical Meeting on Sensors and Micromachines

CMOS Post-Processing of Ciliary Motion Actuators of UV-patterned Polyimides
type: Distribution
format: HTML
issued: 2026-05-15T04:44:44.202076
modified: 2026-05-15T04:44:44.158418
access URL: https://hal.science/hal-00777827

test_moissonnage_selune
type: Agent