Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC
type: Dataset
description: International audience
issued: 2026-06-03T21:37:55.811913
language: en
modified: 2026-06-03T21:37:55.811918
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: spiplasmaengineering-sciences-physicsplasmas
landing page: 1615-6846

Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC
type: Distribution
format: HTML
issued: 2026-06-03T21:37:55.848906
modified: 2026-06-03T21:37:55.800496
access URL: https://hal.science/hal-00757718

test_moissonnage_selune
type: Agent