@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:language "en" ;
    dct:modified "2026-06-04T01:17:54.710378"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Effects of Roughness on Scatterometry Signatures" ;
    dcat:contactPoint [ a vcard:Organization ;
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<FRONTIERS%20OF%20CHARACTERIZATION%20AND%20METROLOGY%20FOR%20NANOELECTRONICS%202011> a foaf:Document .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00757379v1/resource/0ed73848-d78c-47a1-a25c-299204ad2557> a dcat:Distribution ;
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