Generalized ellipsometry of artificially designed line width roughness
type: Dataset
description: International audience
issued: 2026-06-04T01:20:36.633456
language: en
modified: 2026-06-04T01:20:36.633463
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: physphysphys-opticsphysics-physicsphysics-physicsoptics-physicsoptics
landing page: 0040-6090

Generalized ellipsometry of artificially designed line width roughness
type: Distribution
format: HTML
issued: 2026-06-04T01:20:36.691642
modified: 2026-06-04T01:20:36.619162
access URL: https://polytechnique.hal.science/hal-00757371

test_moissonnage_selune
type: Agent