Spatial characterization of Ar-Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy
type: Dataset
description: International audience
landing page: 0963-0252
keyword: 5225os-6849sf-5250dg
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: magnetron-sputtering
keyword: physphysphys-plasm-phphysics-physicsphysics-physicsplasma-physics-physicsplasm-ph
keyword: plasma-discharge
keyword: spectroscopy
issued: 2026-05-15T22:54:23.416870
modified: 2026-05-15T22:54:23.416876
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Spatial characterization of Ar-Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy
type: Distribution
format: HTML
access URL: https://hal.science/hal-00705268
issued: 2026-05-15T22:54:23.442016
modified: 2026-05-15T22:54:23.393815