Numerical and analytical modelling of holed MEMS resonators
type: Dataset
description: International audience
issued: 2026-05-27T21:38:05.710371
language: en
modified: 2026-05-27T21:38:05.710378
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: mems
keyword: modelling
keyword: pacs-8542
keyword: resonator
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: 0924-4247

Numerical and analytical modelling of holed MEMS resonators
type: Distribution
format: HTML
issued: 2026-05-27T21:38:05.729808
modified: 2026-05-27T21:38:05.667975
access URL: https://hal.science/hal-00671984

test_moissonnage_selune
type: Agent