Production of multilayer microcomponents by the sacrificial thick layer method
type: Dataset
identifier: Patent N°: EP n°07712639.9
issued: 2026-05-28T15:49:54.092526
language: en
modified: 2026-05-28T15:49:54.092532
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticspatent
keyword: patents
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: https://hal.science/hal-00670351

Production of multilayer microcomponents by the sacrificial thick layer method
type: Distribution
format: HTML
issued: 2026-05-28T15:49:54.097959
modified: 2026-05-28T15:49:54.081350
access URL: https://hal.science/hal-00670351

test_moissonnage_selune
type: Agent