Nanoscale characterization of different stiction mechanisms in electrostatic RF-MEMS switches
type: Dataset
description: International audience
landing page: Proceedings of European Microwave Week
keyword: adhesion-force
keyword: conference-papers
keyword: dielectric-charging
keyword: field-induced-meniscus
keyword: force-distance
keyword: infoeu-reposemanticsconferenceobject
keyword: rf-mems-switch
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: stiction
issued: 2026-05-28T17:23:49.630432
modified: 2026-05-28T17:23:49.630438
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Nanoscale characterization of different stiction mechanisms in electrostatic RF-MEMS switches
type: Distribution
format: HTML
access URL: https://hal.science/hal-00670114
issued: 2026-05-28T17:23:49.756490
modified: 2026-05-28T17:23:49.604853