@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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              This paper studies capacitively coupled radio-frequency discharges (13.56MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that couples a 2D (r,z) time-dependent fuid module for the charged particles and a 0D kinetic module for the nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define space-time dependent electron parameters for the fuid module and to work-out space-time average rates for the kinetic module. The model gives good predictions for the self-bias voltage and for the intensities of radiative transitions (average and spatially-resolved OES measurements)with the nitrogen SPS and FNS, and with the argon 811nm atomic line (present as an actinometer). Model results underestimate the experimental electron density (average resonant-cavity measurements) by a factor of 3-4.
            """ ;
    dct:identifier "hal-00669733" ;
    dct:issued "2026-05-28T20:44:14.265084"^^xsd:dateTime ;
    dct:language "en" ;
    dct:modified "2026-05-28T20:44:14.265089"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Capacitively coupled radio-frequency discharges in nitrogen at low pressure" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00669733v1/resource/e62be03d-7db8-4977-8fbc-ea31ac8e2b4a> ;
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<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00669733v1/resource/e62be03d-7db8-4977-8fbc-ea31ac8e2b4a> a dcat:Distribution ;
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    dct:issued "2026-05-28T20:44:14.308134"^^xsd:dateTime ;
    dct:modified "2026-05-28T20:44:14.252935"^^xsd:dateTime ;
    dct:title "Capacitively coupled radio-frequency discharges in nitrogen at low pressure" ;
    dcat:accessURL <https://hal.science/hal-00669733> .

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