Characterization and fabrication of fully...
URL: https://hal.science/hal-00099493
Dataset description:
The fabrication of silicon cantilever-based scanning near-field optical microscope probes with fully aluminium-coated quartz tips was optimized to increase production yield....
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Additional Information
| Field | Value |
|---|---|
| Data last updated | unknown |
| Metadata last updated | May 5, 2026 |
| Created | unknown |
| Format | HTML |
| License | No License Provided |
| Created | 6 months ago |
| Id | ff7c1a92-77d9-407f-8957-6359a3a55b0e |
| Package id | oai-hal-hal-00099493v1 |
| Resource type | HTML |
| State | active |