X-Ray reflectometry study of diamond-like carbon films obtained by plasma-assisted chemical vapor deposition
type: Distribution
access URL: https://hal.science/hal-00097890
format: HTML
issued: 2026-05-05T14:44:06.850180
modified: 2026-05-05T14:44:06.838916

test_moissonnage_selune
type: Agent

X-Ray reflectometry study of diamond-like carbon films obtained by plasma-assisted chemical vapor deposition
type: Dataset
contact point: Organization
  fn: CCSD
keyword: elastic-recoil-detection-analysis
keyword: hydrogen
keyword: physcondcm-msphysics-physicscondensed-matter-cond-matmaterials-science-cond-matmtrl-sci
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: x-ray-reflectometry
keyword: density
landing page: 0925-9635
description: X-Ray reflectivity is used to determine the electron density profiles normal to the surface of diamond-like carbon DLC films Ž . prepared by plasma-enhanced chemical vapor deposition PE-CVD . Average values of the scattering lengths obtained from the Ž . specular reflection data and elastic recoil detection analysis ERDA hydrogen measurements are used to calculate the average mass density of the films. The density is shown to be strongly dependent on the hydrogen content. This depends on the plasma parameters. Argon diluted methane plasma produces homogeneous DLC films but generally with a lower density than the films prepared from pure or He diluted plasmas. These later plasmas produce films with a high density contrast and higher densities.
issued: 2026-05-05T14:44:06.849018
language: en
modified: 2026-05-05T14:44:06.849023