DLC films on LiTaO3 for SAW devices
type: Dataset
description: In this work, we study the modification of the piezoelectric surface after immersion in a methane plasma, the adhesion of DLC films without a buffer layer and the patterning of the DLC films needed for opening windows for deposition of other materials or access for metallization. Rutherford backscattering spectroscopy and elastic recoil detection analysis are used to determine the composition of the films and X-ray photoelectron emission spectroscopy allows the determination of the binding state of carbon on the LiTaO substrate. From nano-scratch tests we evaluate the adhesion by measuring the critical loads for first elastic cracking 3 and first delamination. X-ray reflectometry is used to obtain electron density profiles and in particular it yields knowledge of the interfacial layer created during deposition (thickness, electron density, roughness). Better adhesion is obtained at low pressure when competitive sputtering occurs, creating an interfacial layer between LiTaO and carbon.
landing page: 0257-8972
keyword: carbon-thin-films
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: litao
keyword: pecvd
keyword: physcondcm-msphysics-physicscondensed-matter-cond-matmaterials-science-cond-matmtrl-sci
keyword: rbserda
keyword: xrr
issued: 2026-05-05T14:49:16.302605
modified: 2026-05-05T14:49:16.302609
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

DLC films on LiTaO3 for SAW devices
type: Distribution
format: HTML
access URL: https://hal.science/hal-00097858
issued: 2026-05-05T14:49:16.306851
modified: 2026-05-05T14:49:16.292213