Interferometry System for Out-of-plane Microdisplacement Measurement : Application to Mechanical Expertise of Scratch Drive Actuators
type: Dataset
landing page: Proc. of SPIE. Optical Metrology, tome 5145
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
issued: 2026-05-06T05:13:53.838574
modified: 2026-05-06T05:13:53.838578
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Interferometry System for Out-of-plane Microdisplacement Measurement : Application to Mechanical Expertise of Scratch Drive Actuators
type: Distribution
format: HTML
access URL: https://hal.science/hal-00095309
issued: 2026-05-06T05:13:53.840205
modified: 2026-05-06T05:13:53.834580