Dynamic measurements of actuators driven by AlN layers
type: Dataset
issued: 2026-05-06T05:36:41.054131
language: en
modified: 2026-05-06T05:36:41.054135
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject

Dynamic measurements of actuators driven by AlN layers
type: Distribution
format: HTML
issued: 2026-05-06T05:36:41.056018
modified: 2026-05-06T05:36:41.050022
access URL: https://hal.science/hal-00095245

test_moissonnage_selune
type: Agent