@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:modified "2026-05-06T07:26:35.112008"^^xsd:dateTime ;
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    dct:title "Evaluation of the mechanical properties of square membranes prestressed by PECVD silicone oxynitride thin films" ;
    dcat:contactPoint [ a vcard:Organization ;
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<Proc.%20of%20SPIE%2C%20SPIE%20Annual%20Meeting%202004%2C%20Interferometry%20XII%20:%20Applications%2C%204–5%20august%202004%2C%20tome%205532> a foaf:Document .

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    dct:format "HTML" ;
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    dct:title "Evaluation of the mechanical properties of square membranes prestressed by PECVD silicone oxynitride thin films" ;
    dcat:accessURL <https://hal.science/hal-00094984> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
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