Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS
type: Distribution
access URL: https://hal.science/hal-00094931
format: HTML
issued: 2026-05-06T07:48:56.825859
modified: 2026-05-06T07:48:56.817977

test_moissonnage_selune
type: Agent

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS
type: Dataset
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
landing page: MOEMS III, Micromachining and Microfabrication, tome 5343
issued: 2026-05-06T07:48:56.822053
language: en
modified: 2026-05-06T07:48:56.822057