@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:language "en" ;
    dct:modified "2026-05-06T17:20:19.882054"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Silicon oxynitride waveguides developed for opto–mechanical sensing functions" ;
    dcat:contactPoint [ a vcard:Organization ;
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<Proc.%20SPIE%20Photonics%20Fabrication%20Europe%2C%20Integrated%20Optical%20Devices%20:%20Fabrication%20and%20Testing%2C%20tome%204944> a foaf:Document .

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    dct:format "HTML" ;
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    dct:title "Silicon oxynitride waveguides developed for opto–mechanical sensing functions" ;
    dcat:accessURL <https://hal.science/hal-00094547> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
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