Silicon oxynitride waveguides developed for opto–mechanical sensing functions
type: Dataset
issued: 2026-05-06T17:20:19.882047
language: en
modified: 2026-05-06T17:20:19.882054
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
landing page: Fabrication and Testing, tome 4944

Silicon oxynitride waveguides developed for opto–mechanical sensing functions
type: Distribution
format: HTML
issued: 2026-05-06T17:20:19.898662
modified: 2026-05-06T17:20:19.870724
access URL: https://hal.science/hal-00094547

test_moissonnage_selune
type: Agent