Built-In Self-Test techniques for MEMS
type: Dataset
description: ISBN: 88-8231-323-9
landing page: Proc. of 1st International Workshop on Advances in Sensors and Interfaces (IWASI'05)
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
keyword: mems
keyword: pacs-8542
keyword: sensors-network
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
issued: 2026-05-08T01:21:51.128723
modified: 2026-05-08T01:21:51.128728
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Built-In Self-Test techniques for MEMS
type: Distribution
format: HTML
access URL: https://hal.science/hal-00091086
issued: 2026-05-08T01:21:51.142676
modified: 2026-05-08T01:21:51.117458