Non parabolic capacitive coupling in an AFM based microsystem at the picoNewton level
type: Dataset
description: Capacitive coupling is most commonly used in NEMS/MEMS or in Scanning Probe Techniques to either induce a displacement or to detect an external interaction applied to the micro/nanosystem. A parabolic elastic deformation of the sensor signs a capacitive interaction as the applied voltage is varied. In this paper, we present detailed force measurements performed in the submicron range with a picoNewton sensitivity, and using a UHV AFM and a silicon microlever equipped with a metallized microsphere,. A complete treatment of the sensor sphere/plane geometry enables one to detect quantitatively a V4 departure from the parabolic behaviour. This shows that using this setup allows to detect the increased deformation of a lever much before the mechanical instability. More importantly, this effect must be carefully taken into account if sphere/plane absolute separations are to be quantitatively measured on the basis of electrostatic calibration. To our knowledge, this behaviour in AFM is reported for the first time. We believe that it is relevant for the description of NEMS/MEMS behaviour. Moreover, it provides a method to accurately measure the lever spring constant without any direct contact.
landing page: https://hal.science/hal-00088810
keyword: 0779lh
keyword: casimir-force
keyword: electrostatic-force
keyword: force-measurement
keyword: infoeu-reposemanticspreprint
keyword: nanomechanics
keyword: preprints-working-papers-
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
issued: 2026-05-08T20:26:47.671910
modified: 2026-05-08T20:26:47.671915
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Non parabolic capacitive coupling in an AFM based microsystem at the picoNewton level
type: Distribution
format: HTML
access URL: https://hal.science/hal-00088810
issued: 2026-05-08T20:26:47.680270
modified: 2026-05-08T20:26:47.661931