A MEMS piezoelectric vibration energy harvesting device
type: Dataset
description: This paper presents the design and fabrication of a piezoelectric micro power generator to be used as a power source for a wireless sensor node. The device scavenges environmental vibrations and converts it into electrical power through a piezoelectric transduction. The device, that measures 2x2x0.5mm is a resonant structure composed of a seismic mass attached to a cantilever. The device has been built with a MEMS process. The paper presents modelling and simulation of devices using either AlN or PZT piezoelectric layer. The measurements made on a first prototype using an AlN layer have shown a power output of 38nW for 0.5g of excitation at frequency of 204Hz.
issued: 2026-05-12T05:58:40.085992
language: en
modified: 2026-05-12T05:58:40.085998
contact point: Organization
  fn: CCSD
keyword: ain
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
keyword: mems
keyword: piezoelectric
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: vibration-energy-sc-avenging
keyword: wireless-sensor-network

A MEMS piezoelectric vibration energy harvesting device
type: Distribution
format: HTML
issued: 2026-05-12T05:58:40.091656
modified: 2026-05-12T05:58:40.068538
access URL: https://hal.science/hal-00080300

test_moissonnage_selune
type: Agent