@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00080300v1> a dcat:Dataset ;
    dct:description """
              This paper presents the design and fabrication of a piezoelectric micro power generator to be used as a power source for a wireless sensor node. The device scavenges environmental vibrations and converts it into electrical power through a piezoelectric transduction. The device, that measures 2x2x0.5mm is a resonant structure composed of a seismic mass attached to a cantilever. The device has been built with a MEMS process. The paper presents modelling and simulation of devices using either AlN or PZT piezoelectric layer. The measurements made on a first prototype using an AlN layer have shown a power output of 38nW for 0.5g of excitation at frequency of 204Hz.
            """ ;
    dct:identifier "hal-00080300" ;
    dct:issued "2026-05-12T05:58:40.085992"^^xsd:dateTime ;
    dct:language "en" ;
    dct:modified "2026-05-12T05:58:40.085998"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "A MEMS piezoelectric vibration energy harvesting device" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00080300v1/resource/60f9ceb4-8c9f-4d63-bdc3-b778c65a7f01> ;
    dcat:keyword "ain",
        "conference-papers",
        "infoeu-reposemanticsconferenceobject",
        "mems",
        "piezoelectric",
        "spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics",
        "vibration-energy-sc-avenging",
        "wireless-sensor-network" ;
    dcat:landingPage <Fifth%20Int.%20Workshop%20on%20Micro%20and%20Nanotechnology%20for%20Power%20Generation%20and%20Energy%20Conversion%20Applications%20%28PowerMEMS%2705%29%2C%20%2C%20November%2028-30> .

<Fifth%20Int.%20Workshop%20on%20Micro%20and%20Nanotechnology%20for%20Power%20Generation%20and%20Energy%20Conversion%20Applications%20%28PowerMEMS%2705%29%2C%20%2C%20November%2028-30> a foaf:Document .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-hal-00080300v1/resource/60f9ceb4-8c9f-4d63-bdc3-b778c65a7f01> a dcat:Distribution ;
    dct:format "HTML" ;
    dct:issued "2026-05-12T05:58:40.091656"^^xsd:dateTime ;
    dct:modified "2026-05-12T05:58:40.068538"^^xsd:dateTime ;
    dct:title "A MEMS piezoelectric vibration energy harvesting device" ;
    dcat:accessURL <https://hal.science/hal-00080300> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
    foaf:name "test_moissonnage_selune" .