INVESTIGATION OF BORON AND NITROGEN ION BEAM IMPLANTATION IN GOLD THIN FILMS FOR OHMIC MEMS SWITCH CONTACT IMPROVEMENT
type: Dataset
contact point: Organization
  fn: CCSD
keyword: electrical-contact-resistance
keyword: infoeu-reposemanticsconferenceobject
keyword: ohmic-mems-switch
keyword: spimecamsmecaengineering-sciences-physicsmechanics-physicsmed-phmaterials-and-structures
keyword: physmecamsmecaphysics-physicsmechanics-physicsmaterials-and-structures-in-mechanics-physi
keyword: conference-papers
keyword: lifetime
landing page: Proceedings of Tansducers 2013 and Eurosensors XXVII
description: International audience
issued: 2026-05-10T12:27:49.012864
language: en
modified: 2026-05-10T12:27:49.012869

test_moissonnage_selune
type: Agent

INVESTIGATION OF BORON AND NITROGEN ION BEAM IMPLANTATION IN GOLD THIN FILMS FOR OHMIC MEMS SWITCH CONTACT IMPROVEMENT
type: Distribution
access URL: https://hal-emse.ccsd.cnrs.fr/emse-00840099
format: HTML
issued: 2026-05-10T12:27:49.027851
modified: 2026-05-10T12:27:49.003317