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Reactive Gas Pulsing Process for Oxynitride Thin Films
An original reactive sputtering method, namely the reactive gas pulsing process (RGPP) was developed for the synthesis of titanium oxynitride thin films. Such a method... -
TaON thin films deposited by reactive sputtering. Ta-Ar-O2-N2 process study a...
The aim of this thesis is to study the properties of a reactive plasma as well as the structural, optical and electrical properties of tantalum oxynitride thin films...
