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Développement des techniques de scatterométrie en temps réel pour le suivi de...
The miniaturization of the semiconductor devices is made possible by the improvemen of technological processing steps (such as lithography, etching, etc.). This... -
Microstructure of plasma-sprayed titania coatings deposited from spray-dried ...
TiO coatings were prepared by plasma spraying using a spray-dried powder as feedstock material. A systematic study has 2 been performed to determine how the titania...
