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Experimental - modeling study of an atmospheric pressure helium discharge pro...
International audience -
Pulsed Plasmas for Etch Applications
The continuous downscaling in microelectronics imposes increasing demands on the plasma processes and traditional ways for process optimization reach their limits. New... -
Absolute energy distribution of hard X-rays poduced in the interaction of a k...
Previous reports have indicated the anomalous excitation rate for the 6.2 keV nuclear level of 181Ta in a plasma produced with a femtosecond laser. A detailed...
