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MEMS ACTUATORS AND RESONATORS : APPLICATIONS TO NANO-CHARACTERIZATION
My research activities have covered since 1996 the fields of nanosciences, semi-conductor physics, micro and nanotechnologies and MEMS/NEMS... -
Silicon integration and characterization of polyurethane nanocomposite thin f...
This thesis is part of the general development of MEMS microactuators, low cost and simple technology for future applications in the domain of microfluidics. The...
