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Développement des techniques de scatterométrie en temps réel pour le suivi de...
The miniaturization of the semiconductor devices is made possible by the improvemen of technological processing steps (such as lithography, etching, etc.). This... -
Optical Metrology in high enthalpy hypersonics for atmospheric reentry
This document is a review of my research work in optical metrology to probe high enthalpy hypersonic flows encountered during atmospheric reentry. I first relate the...
