13 datasets found

The miniaturization of the semiconductor devices is made possible by the improvemen of technological processing steps (such as lithography, etching, etc.). This...

Chemical and self-assembly approaches are increasingly used for the fabrication of nanostructured materials with controlled optical properties.We have considered the...

The control of the physical properties of materials used to manufacture a product is essential. Therefore, it is necessary to determine their behavioral properties....

Methods to monitor and quantify the chemical reactivity of surfaces at micrometer scale are developed in an optical label-free detector owing to changes in refractive...

This work deals with the optical properties of two types of layered composite materials containing metallic nanostructures which present multipolar plasmon resonances....

Common laser wavemeters are based on a scanning Michelson interferometer. Displacements of the moving mirror as long as tens of centimeters are needed to reach a...

The first part of this manuscript (Chapters 1 to 3) includes all of my work on the dimensional metrology at the nanoscale. After giving an overview of the...

An ellipsometer based on an elasto optic modulation of polarization has been developed. Compare to a rotating polarizer setup, the performances, in term of accuracy...

International audience

The aim of this thesis is to study the properties of a reactive plasma as well as the structural, optical and electrical properties of tantalum oxynitride thin films...

5 pages

5 pages

This study concerns the plasma etching of hybrid materials SiOC(H) which are new emergent compounds. Their adjustable properties between organic and inorganic...