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Inertial Piezoelectric motors : Designs, productions, tests and applications
Inertial Piezoelectric Motors are basically considered as extremely simplemotors, but weak and slow compared to other piezoelectric motor technologies.The present... -
Physico- chemical mechanisms involved in the silicon plasma etching cryogenic...
In microelectronic industries, silicon deep etching allows to obtain high aspect ratio structures (MEMS, MOEMS, vias, deep trench isolation...). Cryoetching is one of...
