-
Improvement of the oxidation interface in an AlGaAs/AlxOy waveguide structure...
The wet oxidation from the mesa sidewalls of AlGaAs/GaAs epitaxial structures is investigated in details. In addition to the intended lateral oxidation of the Al-rich... -
On-chip nano-optomechanical whispering gallery resonators
This thesis work focuses on the design, fabrication and measurement of Gallium Arsenide (GaAs) nano-optomechanical disk resonators. These disks are both GHz frequency...
