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Characterization by electron spin resonance of defects in a-C:H thin films. C...
The structural evolutions of a-C:H thin films prepared by r.f. plasma-enhanced chemical vapor deposition from a CH yAr or 4 CH yHe gas mixture have been investigated.... -
Coupled effects of bombarding ions energy on the microstructure and stress le...
In this work a-C:H films have been prepared in a capacitively coupled RF-PECVD device ( ns13.56 MHz) from methane as the gas source. By the use of ERDA, IRTF and X-Ray...
